Search for dissertations about: "thin film bulk acoustic resonators"

Showing result 6 - 10 of 10 swedish dissertations containing the words thin film bulk acoustic resonators.

2. 6. Advanced MEMS Pressure Sensors Operating in Fluids

   Author : Emil Anderås; Ventsislav Yantchev; Ilia Katardjiev; Jörgen Olsson; Enrico Verona; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; pressure sensor; piezoresistance; nanofilms; AlN; microacoustic; Lamb wave; thin film; resonator; sensitivity; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

   Abstract : Today’s MEMS technology allows manufacturing of miniaturized, low power sensors that sometimes exceeds the performance of conventional sensors. The pressure sensor market today is dominated by MEMS pressure sensors.In this thesis two different pressure sensor techniques are studied. READ MORE

4. 7. Studies of the Reactive Sputtering Process and its Application in Electro-Acoustic Devices

   Author : Daniel Rosén; Sören Berg; Ilia Katardjiev; Claes Nender; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Materials science; Sputtering; Reactive Sputtering; Electro Acoustic Devices; Materialvetenskap; Materials science; Teknisk materialvetenskap;

   Abstract : Electro-acoustic devices such as surface acoustic wave (SAW) and bulk acoustic wave (BAW) devices have been in commercial use for over 60 years and can be found in applications ranging from specialised scientific and military equipment to consumer products, such as mobile telephones, TV and radio receivers, etc. Today by far the largest market for electro-acoustic devices is the telecommunication industry which annually consumes approximately three billion acoustic wave filters for frequency control alone. READ MORE

5. 8. Development of Electroacoustic Sensors for Biomolecular Interaction Analysis

   Author : Henrik Anderson; Ilia Katardjiev; Björn Ingemarsson; Inger Vikholm-Lundin; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; NATURVETENSKAP; NATURAL SCIENCES; biosensor; protein interactions; kinetics; affinity; QCM; quartz crystal microbalance; piezoelectric resonators; dissipation; motional resistance; Bioanalytical engineering; Bioanalytisk teknik; Analytical chemistry; Analytisk kemi; Teknisk fysik med inriktning mot mikrosystemteknik; Engineering Science with specialization in Microsystems Technology;

   Abstract : Biomolecular interaction analysis to determine the kinetics and affinity between interacting partners is important for the fundamental understanding of biology, as well as for the development of new pharmaceutical substances. A quartz crystal microbalance instrument suitable for kinetics and affinity analyses of interaction events was developed. READ MORE

6. 9. Fabrication of Electroacoustic Devices for Integrated Applications

   Author : Johannes Enlund; Ilia Katardjiev; Jörgen Olsson; Uppsala universitet; []
   Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Engineering physics; Teknisk fysik; Elektronik; Electronics;

   Abstract : Electroacoustic technology has in many ways revolutionised the wireless telecommunication industry. The IC compatible fabrication technique of thin film electroacoustic devices has so far provided a considerable increase in device performance and reduction in size. At the moment, new areas where this technology can be of use is under investigation. READ MORE

7. 10. A Theoretical Study of Piezoelectricity, Phase Stability, and Surface Diffusion in Disordered Multicomponent Nitrides

   Author : Christopher Tholander; Björn Alling; Ferenc Tasnádi; Lars Hultman; Susanne Mirbt; Linköpings universitet; []
   Keywords : NATURVETENSKAP; NATURAL SCIENCES; Piezoelectricity; phase stability; surface diffusion; disordered multicomponent nitrides;

   Abstract : Disordered multicomponent nitride thin film can be used for various applications. The focus of this Licentiate Thesis lies on the theoretical study of piezoelectric properties, phase stability and surface diffusion in multifunctional hard coating nitrides using density functional theory (DFT). READ MORE