Search for dissertations about: "tisi2"
Showing result 1 - 5 of 10 swedish dissertations containing the word tisi2.
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1. Thermodynamic and experimental CVD studies of TiSi2 and W
Abstract : .... READ MORE
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2. The reactive formation of TiSi2in the presence of refractory metals
Abstract : Titanium disilicide (TiSi2) has been the favoured material for contactmetallisation in recent Si devices. The formation of TiSi2usually begins with the high resistivity C49 phaseas a result of the Ti-Si interaction at about 300-550 °Cand finishes with the low resistivity C54 phase through theC49-C54 phase transformation at about 700 °C. READ MORE
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3. Ti3SiC2 synthesis from TiC and Si powders
Abstract : The aim of this work was to produce Ti3SiC2 from TiC and Si powders and to investigate process parameters with respect to optimised Ti3SiC2 yield. The reaction pathway of Ti3SiC2 formation and the thermochemical degradation reactions were examined. READ MORE
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4. The use of self-aligned Ti silicide in integrated Si technology
Abstract : The performance and cost efficiency of integrated circuits(IC) are constantly improved by a miniaturization of theindividual device dimensions. As a consequence, the materialand electrical properties of conductors and contacts becomecritical, and fabrication technology development meets newchallenges from the continuous reduction of devicedimensions. READ MORE
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5. Ti3SiC2 synthesis by powder metallurgical methods
Abstract : The MAX phases constitute a group of ternary ceramics which has received intense attention over the last decade due to their unique combination of properties. The Ti3SiC2 is the most well studied MAX phase to date and it has turned out to be a promising candidate for high temperature applications. READ MORE