Search for dissertations about: "titanium nitride thin films"

Showing result 1 - 5 of 16 swedish dissertations containing the words titanium nitride thin films.

  2. 1. Defects in Titanium Aluminum Nitride-Based Thin Films

    Author : Janella Salamania; Magnus Odén; Lars Johnson; Lina Rogström; Zoe Barber; Linköpings universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Thin films; Ti-Al-N; Defects; Physical vapor deposition;

    Abstract : Coatings and thin films inherently contain several types of defects. This thesis aims to enhance the understanding of the relationship of defects on the growth, structure, stability, and properties of titanium aluminum nitride films synthesized by physical vapor deposition techniques. READ MORE

  4. 2. Hollow Cathode Deposition of Thin Films

    Author : Lars-Erik Gustavsson; Ladislav Bárdoš; Hana Baránková; Claes Nender; Uppsala universitet; []
    Keywords : Electronics; Hollow cathode; Hybrid plasma; PVD; TiN films; Ferromagnetic substrates; Magnetized plasma; CrN films; Elektronik;

    Abstract : Thin films of metals and compounds have a very wide range of applications today. Many of the deposition methods used for the production of such films utilize plasma to support the growth the film, e.g. by the supply of energy and the enhancement of reactivity. READ MORE

  5. 3. Nitride Thin Films for Thermoelectric Applications : Synthesis, Characterization and Theoretical Predictions

    Author : Mohammad Amin Gharavi; Per Eklund; Rickard Armiento; Björn Alling; Camille Pallier; Caterina Zanella; Linköpings universitet; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; NATURVETENSKAP; NATURAL SCIENCES; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY;

    Abstract : Thermoelectrics is the reversible process which transforms a temperature gradient across a material into an external voltage through a phenomenon known as the Seebeck effect. This has resulted in niche applications such as solid-state cooling for electronic and optoelectronic devices which exclude the need for a coolant or any moving parts and long-lasting, maintenance-free radioisotope thermoelectric generators used for deep-space exploration. READ MORE

  6. 4. Investigation of Novel Metal Gate and High-κ Dielectric Materials for CMOS Technologies

    Author : Jörgen Westlinder; Jörgen Olsson; Stefan Bengtsson; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; Electronics; metal gate; high-κ dielectics; titanium nitride; zirconium nitride; MOSFET; thin film; tantalum oxide; aluminum nitride; Elektronik; Electronics; Elektronik;

    Abstract : The demands for faster, smaller, and less expensive electronic equipments are basically the driving forces for improving the speed and increasing the packing density of microelectronic components. Down-scaling of the devices is the principal method to realize these requests. READ MORE

  7. 5. Reactive Sputter Deposition of Functional Thin Films

    Author : Lina Liljeholm; Jörgen Olsson; Ilia Katardjiev; Tomas Nyberg; Gonzalo Fuentes Iriarte; Uppsala universitet; []
    Keywords : TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; thin film; reactive sputtering; coating; resonator; sensor; FBAR; SMR; aluminum nitride; Al; B N; Teknisk fysik med inriktning mot elektronik; Engineering Science with specialization in Electronics;

    Abstract : Thin film technology is of great significance for a variety of products, such as electronics, anti-reflective or hard coatings, sensors, solar cells, etc. This thesis concerns the synthesis of thin functional films, reactive magnetron sputter deposition process as such and the physical and functional characterization of the thin films synthesized. READ MORE