Search for dissertations about: "titaniumsilicide"
Found 1 swedish dissertation containing the word titaniumsilicide.
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1. High-Resolution Studies of Silicide-films for Nano IC-Components
Abstract : The function of titanium- and nickel-silicides is to lower the series resistance and contact resistivity in gate, source and drain contacts of an integrated circuit transistor. With decreasing dimensions, the low resistivity C54 TiSi2 is not formed and stays in its high resistivity phase C49. READ MORE
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