Search for dissertations about: "wafer bonding"
Showing result 21 - 25 of 44 swedish dissertations containing the words wafer bonding.
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21. Chemical Mechanical Polishing of Silicon and Silicon Dioxide in Front End Processing
Abstract : Chemical mechanical polishing (CMP) has been used for a long time in the manufacturing of prime silicon wafers for the IC industry. Lately, other substrates, such as silicon-on-insulator has become in use which requires a greater control of the silicon CMP process. READ MORE
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22. Applications of Si1-xGex alloys for Ge devices and monolithic 3D integration
Abstract : As the semiconductor industry moves beyond the 10 nm node, power consumption constraints and reduction of the negative impact of parasitic elements become important. Silicon germanium (Si1−xGex) alloys have been used to amplify the performance of Si based devices and integrated circuits (ICs) for decades. READ MORE
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23. Electrical Characterization of Novel Insulators in Metal-Insulator-Semiconductor Structures
Abstract : This thesis comprises seven papers (A-G) and an extended introduction which puts them into context within a broader field of research. The papers deal with the electrical characterization of some different insulators and interfaces encountered within the realm of silicon based microelectronics. READ MORE
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24. Design and Characterization of RF-LDMOS Transistors and Si-on-SiC Hybrid Substrates
Abstract : With increasing amount of user data and applications in wireless communication technology, demands are growing on performance and fabrication costs. One way to decrease cost is to integrate the building blocks in an RF system where digital blocks and high power amplifiers then are combined on one chip. READ MORE
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25. Silicon Integrated HBV Frequency Multipliers for THz Applications
Abstract : This thesis deals with integrated varactor diode circuits for terahertz (THz) applications. In particular hybrid, monolithic microwave integrated circuits (MMICs), and heterogeneous integration are explored for frequency multiplier applications. READ MORE