Search for dissertations about: "x-ray lithography"

Showing result 1 - 5 of 20 swedish dissertations containing the words x-ray lithography.

  2. 1. Nanofabrication of Diffractive Soft X-ray Optics

    Author : Magnus Lindblom; Hans M. Hertz; Erik H. Anderson; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; Nanofabrication; Zone plate; x-ray; diffractive x-ray optics; x-ray microscopy; Optics; Optik; Physics; Fysik;

    Abstract : This thesis summarizes the present status of the nanofabrication of diffractive optics, i.e. zone plates, and test objects for soft x-ray microscopy at KTH. The emphasis is on new and improved fabrication processes for nickel and germanium zone plates. READ MORE

  4. 2. A new laser-plasma X-ray source for microscopy and lithography

    Author : Lars Rymell; Atomfysik; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; X-ray microscopy; X-ray lithography; Atomic and molecular physics; multilayer mirror; Fysicumarkivet A:1997:Rymell; Atom- och molekylärfysik; X-ray source; Laser-produced plasma; liquid droplet; debris-free; water window;

    Abstract : A new high-brightness source for soft X-rays and EUV-radiation has been developed. This laser-plasma source utilizes a microscopic liquid droplet or jet as target. The result is a reduction of debris emission by several orders of magnitude compared to conventional laser plasmas. READ MORE

  5. 3. Compact Liquid-Jet X-Ray Sources

    Author : Oscar Hemberg; KTH; []
    Keywords : liquid-jet; x-ray; EUV; plasma; electron beam; source;

    Abstract : This thesis describes the development, characterization andoptimization of compact, high-brightness, liquid-jet-targetx-ray sources. Two different source types have been developedfor different wavelength regions and applications. READ MORE

  6. 4. Compact Soft X-Ray Microscopy : Sources, Optics and Instrumentation

    Author : Per Takman; Hans Hertz; Janos Kirz; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; soft x-ray microscopy; water window; compact; laser plasma; liquid jet; zone plate optics; Physics; Fysik;

    Abstract : This thesis describes the development of a sub-60-nm full-period resolution compact soft x-ray microscope operating in the water-window region (2.3-4.4 nm). Soft x-ray water-window microscopy is a powerful technique for high-resolution imaging of organic materials exploiting the natural contrast mechanism between carbon and oxygen, cf. READ MORE

  7. 5. Nanofabrication of Zone Plates for Hard X-Ray Free-Electron Lasers

    Author : Fredrik Uhlén; Ulrich Vogt; Thomas Wilhein; KTH; []
    Keywords : NATURVETENSKAP; NATURAL SCIENCES; X-ray optics; Zone plates; Nanofabrication; X-ray free-electron lasers; Fysik; Physics;

    Abstract : This Thesis describes the development of hard X-ray zone plates intended for focusing radiation at X-ray free-electron lasers (XFELs). XFELs provide unprecedented brightness and zone plates which are put in the intense X-ray beam are at risk of being damaged. READ MORE