Piezoactuators for Microfluidics Towards Dynamic Arraying

Abstract: Microfluidics can be used to increase performance, reduce reagent consumption and increase throughput in chemical analysis. With the forthcoming development of more advanced microfluidic systems, the integration of actuating elements becomes essential, giving the ability to control and manipulate fluid flow as well as sample or other components. This thesis addresses miniaturisation of piezoceramic actuators, in particular important technological issues when actuators are integrated in microfluidic systems. Thick film multilayer fabrication technology for piezo­ceramics has been further developed, e.g. by introducing techniques for integration of microfabricated channel structures and via interconnects in multilayer components. New building techniques have been incorporated to allow miniaturisation of devices. A rapid prototyping technique for advanced multilayer actuators based on mechanical machining has also been developed and used in subsequent work.When interfacing the macro and the micro world in miniaturised chemical analysis systems, non-contact sample dispensing methods such as ink-jet technology are needed. Thus a piezoactuated flow-through microdispenser, suitable for high-speed on-line chemical sample handling has been investigated. A new miniaturised actuator has been developed and integrated in the microdispenser, simplifying assembly and demonstrating an improved performance of the device.With the prospect of performing automated and highly parallel analysis in reusable microarray devices, a new concept for dynamic arraying is presented. Non-contact trapping of particle or bead clusters in a microfluidic system is demonstrated utilising acoustic radiation forces in standing ultrasonic waves. The integration of piezoceramic micro­transducers has been shown to render possible localised and spatially controlled trapping of individually addressable particle clusters in micro­fluidics. The importance of the acoustic near field in miniaturised devices has been identified and utilised to give strong trapping forces. By making use of disposable chemically activated microbead arrays within a flow-through device, a flexible system is emerging with e.g. applications in proteomics.