Surface-Micromachined Vertical-Cavity Micro-Opto-Electro-Mechanical Devices on InP

University dissertation from Kista : Mikroelektronik och informationsteknik

Author: Nicolae Chitica; Kth.; [2003]

Keywords: MOEMS; Optical MEMS; InP; GaInAsP; VCSEL; MOVPE; surface micromachining; tunable devices; vertical cavity devices; air-gap reflectors; III-V micromechanics;

Abstract:

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