Micromechanical three axis accelerometers : design, manufacture and general readout electronics

University dissertation from Chalmers University of Technology

Author: Henrik Rödjegård; Chalmers Tekniska Högskola.; Chalmers University Of Technology.; [2000]

Keywords: TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; accelerometer design; bilk micromaching; MEMS accelerometer; sensor system; sensor test bench; three axis accelerometer;

Abstract:

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