Compound semiconductors : defects and relocation of atoms during growth sputtering and diffusion

University dissertation from Stockholm : KTH

Author: Margareta K. Linnarsson; Kth.; [1997]

Keywords: TEKNIKVETENSKAP; TECHNOLOGY; secondary ion mass spectrometry SIMS ; cascade mixing; redistribution; diffusion; defects; passivation; SiC; A1xGa1-xAs;

Abstract:

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