Total internal reflection ellipsometry : principles and applications

Abstract: Spectroscopic ellipsometry has been used under conditions of total internal reflection to form a new measurement technique called Total Internal Reflection Ellipsometry. When measurement settings are appropriate for surface plasmon resonance to occur it is possible to combine the advantages of both ellipsometry and surface plasmon resonance and obtain very high sensitivity and precision. This approach forms a new ground in the sensor area. Even though the techniques like ellipsometry or surface plasmon resonance have been invented long time ago and are currently on the high level of development, and furthermore total internal reflection ellipsometry has been first reported in the middle of the 20th century, it still seems to be a terra nova among measurement techniques. In this work we make an attempt to give some more light into darkness surrounding this area.In this thesis the principle Internal Reflection Ellipsometry (TIRE) is presented together with its theoretical aspects and description of the measurement system. Several examples of application of TIRE are included