Compound semiconductors : defects and relocation of atoms during growth sputtering and diffusion

Author: Margareta K. Linnarsson; Kth; []

Keywords: ENGINEERING AND TECHNOLOGY; TEKNIK OCH TEKNOLOGIER; TEKNIK OCH TEKNOLOGIER; ENGINEERING AND TECHNOLOGY; secondary ion mass spectrometry SIMS ; cascade mixing; redistribution; diffusion; defects; passivation; SiC; A1xGa1-xAs; Electronics; Elektronik;

Abstract:

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